Oxford Instruments specialises in the design, manufacture and support of innovative solutions, tools and systems for the emerging nanotechnology markets in areas such as XRF (X-ray Fluorescence) analysers , microanalysis systems, superconducting wires, NMR (nuclear magnetic resonance) magnets, cryogenic systems, plasma etch and deposition low temperature environments and coating thickness measurement.

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Particle Detection, Analysis and Classification with INCAFeature

INCAFeature : EDS X-ray Microanalysis feature detection, analysis and classification

The new, high performance EDS feature detection, analysis and classification product on the INCA platform.

INCAFeature sets new standards for accuracy, reliability and productivity in feature analysis applications. It offers high-performance detection, analysis and classification of the features in a specimen, whether they be, for example, embedded mineral grains, inclusions in steel, gunshot residue or the constituents of a pharmaceutical powder. The new tool will prove invaluable in applications like checking for the presence and source of contaminants in, say, the production of disk drives or automotive components, or identifying the type and density of inclusions in a steel rod. It provides fast, accurate information about feature morphology and chemistry.

Standard Features

  • Full Quant, Cameo and Spectrum Matching are available for classification by chemistry
  • Beam and stage positions of all features are stored with data
  • Features can be reclassified using different classification schemes 
  • Graphical tools are provided for easy data manipulation and display

Additional Features

  • Real time manipulation of 3-D stage mimic
  • Image acquisition optimised for fast and accurate detection of features
  • Detection of up to 100,000 features in a sample
  • Live review of data
  • Feature classification by morphology, chemistry and position
  • Graphical tools for defining classification schemes
  • Analysis parameters are saved in recipes for re-use
  • Features can be relocated for further data acquisition 
  • Features can be reclassified without reacquisition of data

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